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Publications information icon

Atomic layer epitaxy: Chemical opportunities and challenges

Peer-reviewed
Niinistö, L.; Leskelä, M.
-1992Publications information icon

Growth of PbS thin films from a novel precursor by atomic layer epitaxy

Peer-reviewed
Nykänen, E.; Laine-Ylijoki, J.; Leskelä, M.; Niinistö, L.; Soininen, P.; Hubert-Pfalzgraf, L.G.
-1992Publications information icon

Atomic Layer Epitaxy

Peer-reviewed
Niinistö, Lauri
Current Opinion in Solid State and Materials Science1998Publications information icon

AFM, SEM, XPS and RHEED investigation of TiO2 thin films grown by atomic layer deposition

Peer-reviewed
Sammelselg, V.; Rosental, A.; Tarre, A.; Niinistö, L.; Johansson, L.-S.; Uustare, T.
-1997Publications information icon

Atomic layer epitaxy: chemical opportunities and challenges

Peer-reviewed
Niinistö, L.; Leskelä, M.
Thin Solid Films1993Publications information icon

Atomic layer epitaxy growth of LaGaO_(3) thin films

Peer-reviewed
Nieminen, Minna; Lehto, Sari; Niinistö, Lauri
Journal of Materials Chemistry2001Publications information icon

Covering of porous silicon pores by atomic layer epitaxy

Utriainen, M.; Lehto, S.; Nieminen, M.; Niinistö, L.; Ducsö, C.; Khan, N.Q.; Horvath, Z.; Barsony, I...
-1996Publications information icon

ALE growth of titanium dioxide thin films

Peer-reviewed
Ritala, M.; Leskelä, M.; Nykänen, E.; Soininen, P.; Niinistö, L.
-1992Publications information icon

Growth of oxide thin films by atomic layer epitaxy

Mölsä, H.; Nieminen, M.; Viirola, H.; Niinistö, L.
-1994Publications information icon

Porous silicon host matrix for deposition by atomic layer epitaxy

Utriainen, M.; Lehto, S.; Niinistö, L.; Ducsö, C.; Khanh, N.Q.; Horvath, Z.; Barsony, I.; Petö, G.; ...
-1996

Atomic layer epitaxy: Chemical opportunities and challenges

Peer-reviewed
1992

Growth of PbS thin films from a novel precursor by atomic layer epitaxy

Peer-reviewed
1992

Atomic Layer Epitaxy

Peer-reviewed
1998

AFM, SEM, XPS and RHEED investigation of TiO2 thin films grown by atomic layer deposition

Peer-reviewed
1997

Atomic layer epitaxy: chemical opportunities and challenges

Peer-reviewed
1993

Atomic layer epitaxy growth of LaGaO_(3) thin films

Peer-reviewed
2001

Covering of porous silicon pores by atomic layer epitaxy

1996

ALE growth of titanium dioxide thin films

Peer-reviewed
1992

Growth of oxide thin films by atomic layer epitaxy

1994

Porous silicon host matrix for deposition by atomic layer epitaxy

1996